EXTREME ULTRAVIOLET LITHOGRAPHY


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EXTREME ULTRAVIOLET LITHOGRAPHY
Franco Cerrina and Fan Jiang Electrical and Computer Engineering & Center for NanoTechnology University of Wisconsin Madison, Wisconsin 1010606EXTREME ULTRAVIOLET LITHOGRAPHY
<emphasis role="bold">INTRODUCTION</emphasis> The evolution of the integrated circuit is based on the continuous shrinking of the dimensions of the devices, generation after generation of produ…
Citation
Michael Bass: Handbook of Optics: Volume V – Atmospheric Optics, Modulators, Fiber Optics, X-Ray and Neutron Optics, Third Edition. EXTREME ULTRAVIOLET LITHOGRAPHY, Chapter (McGraw-Hill Professional, 2010), AccessEngineering Export