Page Contents
- Overview
- Objectives
- Introduction
- Formation of a Doped Region by Diffusion
- Formation of a Doped Region and Junction by Diffusion
- Diffusion Process Steps
- Deposition
- Drive-in Oxidation
- Introduction to Ion Implantation
- Concept of Ion Implantation
- Ion Implantation System
- Dopant Concentration in Implanted Regions
- Evaluation of Implanted Layers
- Uses of Ion Implantation
- The Future of Doping
- Review Questions