Semiconductor Manufacturing Handbook, Second Edition

by: Hwaiyu Geng, CMfgE, PE


Abstract: Thoroughly revised, state-of-the-art semiconductor design, manufacturing, and operations information. Written by 70 international experts and reviewed by a seasoned technical advisory board, this fully updated resource clearly explains the cutting-edge processes used in the design and fabrication of IC chips, MEMS, sensors, and other electronic devices. Semiconductor Manufacturing Handbook, Second Edition, covers the emerging technologies that enable the Internet of Things, the Industrial Internet of Things, data analytics, artificial intelligence, augmented reality, and and smart manufacturing. You will get complete details on semiconductor fundamentals, front- and back-end processes, nanotechnology, photovoltaics, gases and chemicals, fab yield, and operations and facilities. Coverage includes: • Nanotechnology and microsystems manufacturing • FinFET and nanoscale silicide formation • Physical design for high-performance, low-power 3D circuits • Epitaxy, anneals, RTP, and oxidation • Microlithography, etching, and ion implantation • Physical, chemical, electrochemical, and atomic layer vapor deposition • Chemical mechanical planarization • Atomic force metrology • Packaging, bonding, and interconnects • Flexible hybrid electronics • Flat-panel, flexible display electronics, and photovoltaics • Gas distribution systems • Ultrapure water and filtration • Process chemicals, handling, and abatement • Chemical and slurry handling systems • Yield management, CIM, and factory automation • Manufacturing execution systems • Advanced process control • Airborne molecular contamination • ESD controls in cleanroom environments • Vacuum systems and RF plasma systems • IC manufacturing parts cleaning technology • Vibration and noise design • And much more
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Book Details

Title: Semiconductor Manufacturing Handbook, Second Edition

Publisher: McGraw-Hill Education: New York, Chicago, San Francisco, Athens, London, Madrid, Mexico City, Milan, New Delhi, Singapore, Sydney, Toronto

Copyright / Pub. Date: 2018, 2005 McGraw-Hill Education

ISBN: 9781259587696

Authors:

Hwaiyu Geng, CMfgE, PE is a principal at Amica Research (Palo Alto, California), promoting green engineering and manufacturing programs. He has had over 40 years of diversified engineering and management experience, working with Applied Materials, Hewlett-Packard, and Intel on international high-tech projects. He has written and presented at international conferences numerous technical papers. Mr. Geng is also the editor of McGraw-Hill's Manufacturing Engineering Handbook. He is a patent holder.

Description: Thoroughly revised, state-of-the-art semiconductor design, manufacturing, and operations information. Written by 70 international experts and reviewed by a seasoned technical advisory board, this fully updated resource clearly explains the cutting-edge processes used in the design and fabrication of IC chips, MEMS, sensors, and other electronic devices. Semiconductor Manufacturing Handbook, Second Edition, covers the emerging technologies that enable the Internet of Things, the Industrial Internet of Things, data analytics, artificial intelligence, augmented reality, and and smart manufacturing. You will get complete details on semiconductor fundamentals, front- and back-end processes, nanotechnology, photovoltaics, gases and chemicals, fab yield, and operations and facilities. Coverage includes: • Nanotechnology and microsystems manufacturing • FinFET and nanoscale silicide formation • Physical design for high-performance, low-power 3D circuits • Epitaxy, anneals, RTP, and oxidation • Microlithography, etching, and ion implantation • Physical, chemical, electrochemical, and atomic layer vapor deposition • Chemical mechanical planarization • Atomic force metrology • Packaging, bonding, and interconnects • Flexible hybrid electronics • Flat-panel, flexible display electronics, and photovoltaics • Gas distribution systems • Ultrapure water and filtration • Process chemicals, handling, and abatement • Chemical and slurry handling systems • Yield management, CIM, and factory automation • Manufacturing execution systems • Advanced process control • Airborne molecular contamination • ESD controls in cleanroom environments • Vacuum systems and RF plasma systems • IC manufacturing parts cleaning technology • Vibration and noise design • And much more