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Category

Nanotechnology Engineering

Advanced MEMS Packaging
ISBN : 0071741836
Author : John H. Lau

Contents

Chapter 1 INTRODUCTION TO MEMS
Chapter 2 ADVANCED MEMS PACKAGING
Chapter 3 ENABLING TECHNOLOGIES FOR ADVANCED MEMS PACKAGING
Chapter 4 ADVANCED MEMS WAFER-LEVEL PACKAGING
Chapter 5 OPTICAL MEMS PACKAGING: COMMUNICATIONS
Chapter 6 OPTICAL MEMS PACKAGING: BUBBLE SWITCH
Chapter 7 OPTICAL MEMS: MICROBOLOMETER PACKAGING
Chapter 8 BIO-MEMS PACKAGING
Chapter 9 BIOSENSOR PACKAGING
Chapter 10 ACCELEROMETER PACKAGING
Chapter 11 RADIOFREQUENCY MEMS SWITCHES
Chapter 12 RF MEMS TUNABLE CAPACITORS AND TUNABLE BAND-PASS FILTERS
Chapter 13 ADVANCED PACKAGING OF RF MEMS DEVICES

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