AN INTRODUCTION TO MICROELECTROMECHANICAL SYSTEMS (MEMS)


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AN INTRODUCTION TO MICROELECTROMECHANICAL SYSTEMS (MEMS)
AN INTRODUCTION TO MICROELECTROMECHANICAL SYSTEMS (MEMS)by Luc G. Fr├ęchette
INTRODUCTION
Trend toward Small Scales The twentieth century was marked by mankind's accomplishments at ever increasing scales, from civil works such as bridges that span rivers to sophisticated machinery such as airplanes and spacecraft that span our planet and beyond. Although this quest for immensity will remain vibrant, the twenty-first century will likely be marked by achievements at smaller scales. This trend is best demonstrated by the information revolution experienced by our society over th…
Citation
Ali M. Sadegh, Ph.D.; William M. Worek, Ph.D.: Marks' Standard Handbook for Mechanical Engineers, 12th Edition. AN INTRODUCTION TO MICROELECTROMECHANICAL SYSTEMS (MEMS), Chapter (McGraw-Hill Professional, 2018), AccessEngineering Export