MICROELECTRO-MECHANICAL SYSTEMS (MEMS)


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MICROELECTRO-MECHANICAL SYSTEMS (MEMS)
10106001011111MICROELECTRO-MECHANICAL SYSTEMS (MEMS)
<emphasis role="bold">INTRODUCTION</emphasis> This chapter gives a state-of-the-art review of many books and papers to help the readers understand the basics of the performance and application of microelectromechanical systems. The authors considered in the review are 1. Michalicek, M.A., Introduction to Microelectromechanical Systems, Ai…
Citation
V. C. Venkatesh; Sudin Izman: Precision Engineering. MICROELECTRO-MECHANICAL SYSTEMS (MEMS), Chapter (McGraw-Hill Professional, 2007), AccessEngineering Export